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Optical Engineering

Precompensation approach for improving the quality of laser direct writing patterns by a modified proximity function
Author(s): Jinglei Du; Fuhua Gao; Yongkang Guo; Chunlei Du; Chuankai Qiu; Zheng Cui
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Paper Abstract

By applying energy conservation to the effect of a laser beam on a resist, a modified proximity function is proposed. The measured data on energy absorption in a photoresist are fitted well with the modified function. By using the new model, an effective precompensation method can be used to correct proximity effects in laser direct writing. Experimental results have been obtained on a laser direct writing machine with line width of 0.6 ?m.

Paper Details

Date Published: 1 March 2000
PDF: 5 pages
Opt. Eng. 39(3) doi: 10.1117/1.602426
Published in: Optical Engineering Volume 39, Issue 3
Show Author Affiliations
Jinglei Du, Sichuan Univ. (China)
Fuhua Gao, Sichuan Univ. (China)
Yongkang Guo, Sichuan Univ. (China)
Chunlei Du, Institute of Optics and Electronics (China)
Chuankai Qiu, State Key Lab. of Optical Technologies for Microfabrication (China)
Zheng Cui, Rutherford Appleton Lab. (United Kingdom)

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