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Optical Engineering

Noncontact homodyne scanning laser vibrometer for dynamic measurement
Author(s): Bryan Kok Ann Ngoi; Krishnan Venkatakrishnan
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Paper Abstract

A technique and apparatus for noncontact dynamic parameter measurement of micro- and macrodevices using an acousto-optic (AO) deflector for scanning is introduced. This system adopts an AO deflector to induce scanning in the laser beam rather than deflecting mirror or the movement of the X- Y stages to improve the positioning accuracy. The apparatus for incorporating a homodyne system in a laser scanning system is described. The system is composed of an interference technique by which the frequency shift induced in the scanning beam using the AO deflector is canceled out. Experimental results on measuring the dynamic parameter of the hard disk surface and the slider head on different scanning points are discussed.

Paper Details

Date Published: 1 February 2000
PDF: 6 pages
Opt. Eng. 39(2) doi: 10.1117/1.602389
Published in: Optical Engineering Volume 39, Issue 2
Show Author Affiliations
Bryan Kok Ann Ngoi, Nanyang Technological Univ. (Singapore)
Krishnan Venkatakrishnan, Nanyang Technological Univ. (Singapore)


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