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Optical Engineering

Applying branching processes theory for building a statistical model for scanning electron microscope signal
Author(s): Ira Cohen; Rotem Golan; Stanley R. Rotman
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Paper Abstract

Branching stochastic processes are used to describe random systems such as nuclear chain reactions, population development, and gene propagation. We show that the creation of a scanning-electron- microscope signal can be described as a branching stochastic process. A statistical model is described step by step, as a function of the physical parameters of the process. Using the model, we propose a method for determining the unknown probability distribution of the secondary electron emission. Using this method, a lognormal distribution is shown to approximate the secondary electron emission well, and a Poisson distribution is shown to do so poorly.

Paper Details

Date Published: 1 January 2000
PDF: 6 pages
Opt. Eng. 39(1) doi: 10.1117/1.602358
Published in: Optical Engineering Volume 39, Issue 1
Show Author Affiliations
Ira Cohen, Opal Technologies (Israel)
Rotem Golan, Ben-Gurion Univ. (Israel)
Stanley R. Rotman, Ben-Gurion Univ. of the Negev (Israel)


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