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Optical Engineering

Geometrically desensitized interferometry for shape measurement of flat surfaces and 3-D structures
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Paper Details

Date Published: 1 January 2000
PDF: 5 pages
Opt. Eng. 39(1) doi: 10.1117/1.602339
Published in: Optical Engineering Volume 39, Issue 1
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)
Xavier Colonna de Lega, Zygo Corp. (United States)
Dave Stephenson, Zygo Corp. (United States)


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