Share Email Print

Optical Engineering

Geometrically desensitized interferometry for shape measurement of flat surfaces and 3-D structures
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Details

Date Published: 1 January 2000
PDF: 5 pages
Opt. Eng. 39(1) doi: 10.1117/1.602339
Published in: Optical Engineering Volume 39, Issue 1
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)
Xavier Colonna de Lega, Zygo Corp. (United States)
Dave Stephenson, Zygo Corp. (United States)

© SPIE. Terms of Use
Back to Top