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Optical Engineering

Direct shape measurement by digital wavefront reconstruction and multi-wavelength contouring
Author(s): Chr. Wagner; Wolfgang Osten; Soenke Seebacher
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Paper Abstract

We present a direct holographic multiwavelength contouring technique for shape measurement of microcomponents with large height steps and/or spatially isolated object areas. The measurement is based on the digital recording and reconstruction of wavefronts using a CCD sensor. Absolute phase measurement is ensured by multiwavelength contouring. Consequently the whole measurement procedure delivers a direct and unambiguous approach to the continuous phase without unwrapping. An algorithm is presented to chose a minimum number of different wavelengths to improve the accuracy of the phase measurement. The results are verified by an experimental setup and some practical examples.

Paper Details

Date Published: 1 January 2000
PDF: 7 pages
Opt. Eng. 39(1) doi: 10.1117/1.602338
Published in: Optical Engineering Volume 39, Issue 1
Show Author Affiliations
Chr. Wagner, Bremen Institut fuer Angewandte Strahltechnik GmbH (Germany)
Wolfgang Osten, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Soenke Seebacher, Bremer Institut fuer Angewandte Strahltechnik GmbH (Germany)

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