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Optical Engineering

Surface topography by wavelength scanning interferometry
Author(s): Ichirou Yamaguchi; Akihiro Yamamoto; Masaru Yano
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Paper Abstract

Parallel and absolute measurement of surface shape using wavelength scanning interferometry are applied to various objects, including diffuse and milled surfaces having discontinuities such as steps, dips, and protrusions. We employ not only the Michelson setup but also the newly introduced Fizeau setup. The behaviors of interference signals arising from these objects are experimentally compared. Spiky noises are observed from the milled surfaces and from the defocused diffuse surface. In spite of the noise, we succeed in measuring steps and narrow dips on a mirror and a milled surface, as well as a cylindrical protrusion on a diffuse surface. With a dye laser of 4.2 nm tuning range we attain a resolution of 39 µm within a depth of 3 mm.

Paper Details

Date Published: 1 January 2000
PDF: 7 pages
Opt. Eng. 39(1) doi: 10.1117/1.602333
Published in: Optical Engineering Volume 39, Issue 1
Show Author Affiliations
Ichirou Yamaguchi, RIKEN-Institute of Physical and Chemical Research (Japan)
Akihiro Yamamoto, Institute of Physical and Chemical Research (RIKEN) (Japan)
Masaru Yano, Saitama Univ. (Japan)

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