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Optical Engineering

Surface topography by wavelength scanning interferometry
Author(s): Ichirou Yamaguchi; Akihiro Yamamoto; Masaru Yano
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Paper Details

Date Published: 1 January 2000
PDF: 7 pages
Opt. Eng. 39(1) doi: 10.1117/1.602333
Published in: Optical Engineering Volume 39, Issue 1
Show Author Affiliations
Ichirou Yamaguchi, RIKEN-Institute of Physical and Chemical Research (Japan)
Akihiro Yamamoto, Institute of Physical and Chemical Research (RIKEN) (Japan)
Masaru Yano, Saitama Univ. (Japan)

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