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Optical Engineering

Confocal principle for macro- and microscopic surface and defect analysis
Author(s): Hans J. Tiziani; M. Wegner; Daniela Steudle
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Paper Details

Date Published: 1 January 2000
PDF: 8 pages
Opt. Eng. 39(1) doi: 10.1117/1.602332
Published in: Optical Engineering Volume 39, Issue 1
Show Author Affiliations
Hans J. Tiziani, Univ. Stuttgart (Germany)
M. Wegner, Institut fuer Technische Optik (Germany)
Daniela Steudle, DLR (Germany)


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