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Optical Engineering

Design of an optical probe for surface profile measurement
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Paper Details

Date Published: 1 July 1999
PDF: 6 pages
Opt. Eng. 38(7) doi: 10.1117/1.602279
Published in: Optical Engineering Volume 38, Issue 7
Show Author Affiliations
Peisen S. Huang, SUNY/Stony Brook (United States)
Xiaorong R. Xu, Massachesetts Inst. of Technology (United States)


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