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Optical Engineering

Digital phase-shifting shearography for slope measurement
Author(s): Y. M. He; Cho Jui Tay; Huai Min Shang
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Paper Abstract

An electronic speckle shearing interferometry method for the full field measurement of the slope of an object is presented. The object under study is placed on a rotating platform and illuminated by an expanded laser beam. Its image is recorded by a shearing CCD camera and stored directly into a computer. By recording two images before and after giving the object a small angle of rotation, the resulting correlation fringe pattern that represents the object surface slope can be obtained. The theory of the new method and some experimental results are presented.

Paper Details

Date Published: 1 September 1999
PDF: 5 pages
Opt. Eng. 38(9) doi: 10.1117/1.602211
Published in: Optical Engineering Volume 38, Issue 9
Show Author Affiliations
Y. M. He, Huazhong Univ. of Science and Technology (China)
Cho Jui Tay, Institute of Microelectronics (Singapore)
Huai Min Shang, National Univ. of Singapore (Singapore)

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