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Optical Engineering

Measurement of physical thicknesses in micromachined structures consisting of glass and c-Si, by Fourier transform infrared
Author(s): Morten Kildemo; V. Dalsrud; O. Fostad
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Paper Details

Date Published: 1 September 1999
PDF: 11 pages
Opt. Eng. 38(9) doi: 10.1117/1.602205
Published in: Optical Engineering Volume 38, Issue 9
Show Author Affiliations
Morten Kildemo, Nat. Microelectronic Research Center (NMRC) (Ireland)
V. Dalsrud, SensoNor ASA (Norway)
O. Fostad, SensoNor ASA (Norway)


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