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Optical Engineering

General phase-stepping algorithm with automatic calibration of phase steps
Author(s): Chunlong Wei; Mingyi Chen; Zhijiang Wang
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Paper Abstract

A new general algorithm for phase-stepping interferometry is presented. The calculation of the phase distribution is composed of three least-squares fitting procedures for an analysis of real interferograms. First, we calculate the initial phase distribution utilizing Lissajous figures and elliptic least-squares fitting. Second, we calculate the phase steps through the spatial least-squares fitting. Finally, we calculate the exact phase distribution through the serial least-squares fitting. Both insensitivity to phase-step errors and automatic calibration of phase steps for the new algorithm are confirmed by experiment.

Paper Details

Date Published: 1 August 1999
PDF: 4 pages
Opt. Eng. 38(8) doi: 10.1117/1.602190
Published in: Optical Engineering Volume 38, Issue 8
Show Author Affiliations
Chunlong Wei, Shanghai Univ. (China)
Mingyi Chen, Shanghai Univ. (China)
Zhijiang Wang, Shanghai Institute of Optics and Fine Mechanics (China)

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