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Optical Engineering

Modeling scatter from silicon wafer features based on discrete sources method
Author(s): Yuri A. Eremin; John C. Stover; N. V. Orlov
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Paper Details

Date Published: 1 August 1999
PDF: 9 pages
Opt. Eng. 38(8) doi: 10.1117/1.602187
Published in: Optical Engineering Volume 38, Issue 8
Show Author Affiliations
Yuri A. Eremin, Moscow Lomonosov State Univ. (Russia)
John C. Stover, ADE Optical Systems (United States)
N. V. Orlov, ADE Optical System Corp. (United States)

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