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Optical Engineering

Fixed-polarizer ellipsometry: a simple technique to measure the thickness of very thin films
Author(s): Brian Trotter; Garret Moddel; Rachel Ostroff; Gregory R. Bogart
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Paper Abstract

The fixed-polarizer ellipsometer measures thickness of thin films. It is simple, inexpensive, and provides a linear response over a range of 800 Å. We develop a matrix formulation to describe the optical characteristics of the instrument and apply it to the case of a single thin film on a substrate. Excellent agreement is found between experimental and simulated results. Applying the instrument to optical immunoassay, we show that its sensitivity can extend to 4 pg/ml, depending upon the analyte. This compares favorably with commercially available manual and automated immunoassay systems. The fixed-polarizer ellipsometer appears to be well-suited for use in laboratory and production environments.

Paper Details

Date Published: 1 May 1999
PDF: 6 pages
Opt. Eng. 38(5) doi: 10.1117/1.602049
Published in: Optical Engineering Volume 38, Issue 5
Show Author Affiliations
Brian Trotter, Univ. of Colorado (United States)
Garret Moddel, Univ. of Colorado/Boulder (United States)
Rachel Ostroff, BioStar, Inc. (United States)
Gregory R. Bogart, Lucent Technologies/Bell Labs. (United States)


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