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Optical Engineering

Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer
Author(s): Osami Sasaki; Takayuki Nakada; Takamasa Suzuki
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Paper Abstract

A superluminescent diode interferometer that uses sinusoidal phase-modulating interferometry and the shifting method is applied to measure the front and rear surface profiles of a glass plate with an accuracy of a few nanometers. Since the roughness of the reference surface is large, a glass plate is put behind the object as another reference surface, which is estimated by the shifting method with an accuracy of a few nanometers.

Paper Details

Date Published: 1 October 1999
PDF: 4 pages
Opt. Eng. 38(10) doi: 10.1117/1.602038
Published in: Optical Engineering Volume 38, Issue 10
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Takayuki Nakada, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)


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