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Optical Engineering

Influence of nonuniform pupils in imaging periodical structures by photolithographic systems
Author(s): Rosemarie Hild; Maria Josefa Yzuel; Juan C. Escalera; Juan Campos
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Paper Details

Date Published: 1 April 1998
PDF: 11 pages
Opt. Eng. 37(4) doi: 10.1117/1.601969
Published in: Optical Engineering Volume 37, Issue 4
Show Author Affiliations
Rosemarie Hild, Friedrich-Schiller Univ. (Germany)
Maria Josefa Yzuel, Univ. Autonoma de Barcelona (Spain)
Juan C. Escalera, Autonomous Univ. of Barcelona (Spain)
Juan Campos, Universitad Autono de Barcelona (Spain)


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