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Optical Engineering

System for laser writing to lithograph masks for integrated optics
Author(s): Jose Ramon Salgueiro; Juan F. Roman; Vincente Moreno de las Cuevas
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Paper Details

Date Published: 1 April 1998
PDF: 9 pages
Opt. Eng. 37(4) doi: 10.1117/1.601945
Published in: Optical Engineering Volume 37, Issue 4
Show Author Affiliations
Jose Ramon Salgueiro, Univ. de Santiago de Compostela (Spain)
Juan F. Roman, Air Force Wright Lab. (Spain)
Vincente Moreno de las Cuevas, Univ. de Santiago de Compostela (Spain)

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