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Optical Engineering

Optical diffraction inspection of periodic structures using neural networks
Author(s): Alastair D. McAulay; Junqing Wang
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Paper Details

Date Published: 1 March 1998
PDF: 5 pages
Opt. Eng. 37(3) doi: 10.1117/1.601922
Published in: Optical Engineering Volume 37, Issue 3
Show Author Affiliations
Alastair D. McAulay, Lehigh Univ. (United States)
Junqing Wang, Lehigh Univ. (United States)


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