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Optical Engineering

Efficient chip counting system with a modified scanner
Author(s): Tzong-Sheng Lee; Jin-Shown Shie
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Paper Abstract

A low-cost imaging system capable of recognizing and counting semiconductor good dice is designed and is proven experimentally to be effective. The system utilizes a commercial scanner with the least modification of its inner optics by a beamsplitter-insertion method. Patterns on specular die surfaces therefore can be grabbed clearly, which results in the marks on defective dice being distinguishable. Also, a mask algorithm is developed to count the good dice on an adhesive tape, according to the gray-level histogram and the converted binary picture of the scanned image. The built-in software associated with the scanner, which is reliable and user-friendly, can also be incorporated into the designated algorithm without paying an additional price for system development.

Paper Details

Date Published: 1 September 1998
PDF: 7 pages
Opt. Eng. 37(9) doi: 10.1117/1.601830
Published in: Optical Engineering Volume 37, Issue 9
Show Author Affiliations
Tzong-Sheng Lee, National Chiao Tung Univ. (Taiwan)
Jin-Shown Shie, National Chiao Tung Univ. (Taiwan)

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