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Optical Engineering

Multispectral dielectric micro-filter arrays for local resolving color sensors
Author(s): Marcus Frank; Uwe B. Schallenberg; Norbert Kaiser
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Paper Abstract

Dielectric microfilters are designed and developed providing different filter functions on 3-in. substrates. Combining several coating procedures, microlithographic techniques, and dry-etching processes, spectral properties of basic filters are modified within patterns with feature sizes down to 5 µm, resulting in large-area filter patterns (>5 cm2) with multiple spectral characteristics and vertical edge profiles. By applying these techniques within a three-step-iterative procedure red, green, and blue filters (RGB) are arranged edge to edge on one substrate to form a multispectral dielectric microfilter array for use as a key component in a local resolving color sensor. These microfilters are arranged in an array of 19 identical hexagons consisting of three rhombi each. The number of these arrays amounts to 81 on a single 3-in. substrate. A modular setup of a compact local resolving color sensor is presented, consisting of Si p-i -n photoelectric cells, dielectric microfilter arrays, an imaging lens, and a final glass cover plate with an IR-blocking filter.

Paper Details

Date Published: 1 September 1998
PDF: 8 pages
Opt. Eng. 37(9) doi: 10.1117/1.601765
Published in: Optical Engineering Volume 37, Issue 9
Show Author Affiliations
Marcus Frank, Fraunhofer Institution for Applied Optics and Precision Engineering (Germany)
Uwe B. Schallenberg, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Norbert Kaiser, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)

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