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Optical Engineering

Composition-dependent structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite filters prepared by reactive ion-assisted codeposition
Author(s): Rung-Ywan Tsai; Sen Chrong Shiau; Fang Chung Ho; Mu-Yi Hua
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Paper Abstract

The influences of TiO2 contents on the structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite films prepared by reactive ion-assisted codeposition are systematically investigated. The CaF2 films deposited at an ambient substrate temperature are found to have superior optical, mechanical, and moisture resistant properties with the addition of 10 at. % TiO2. The structure of this film changes from polycrystalline CaF2 to a mixed phase of amorphous TiO2 and polycrystalline CaF2. The hardness of composite films containing 45 at. % TiO2 is even higher than that of pure TiO2 and glass, which is attributed to the isolation of the crystalline CaF2 grains by the interconnection of the amorphous TiO2 dispersoids.

Paper Details

Date Published: 1 September 1998
PDF: 5 pages
Opt. Eng. 37(9) doi: 10.1117/1.601762
Published in: Optical Engineering Volume 37, Issue 9
Show Author Affiliations
Rung-Ywan Tsai, Industrial Technology Research Institute (Taiwan)
Sen Chrong Shiau, Industrial Technology Research Institute (Taiwan)
Fang Chung Ho, Industrial Technology Research Institute (Taiwan)
Mu-Yi Hua, National Tsing Hua Univ. (Taiwan)


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