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Optical Engineering

Development and applications of a laser writing lithography system for maskless patterning
Author(s): Yuen Chuen Chan; Yee Loy Lam; Yan Zhou; Feng-Lan Xu; ChinYi Liaw; Wei Jiang; Jaeshin Ahn
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Paper Details

Date Published: 1 September 1998
PDF: 10 pages
Opt. Eng. 37(9) doi: 10.1117/1.601760
Published in: Optical Engineering Volume 37, Issue 9
Show Author Affiliations
Yuen Chuen Chan, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)
Yan Zhou, Nanyang Technological Univ. (Singapore)
Feng-Lan Xu, Nanyang Technological Univ. (Singapore)
ChinYi Liaw, Nanyang Technological Univ. (Singapore)
Wei Jiang, Chartered Semiconductor Manufacturing, Ltd. (United States)
Jaeshin Ahn, Nanyang Technological Univ. (Singapore)


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