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Optical Engineering

Interferometer distance measurement system using a linear detector array
Author(s): Yuxian Xu; Qingxiang Li; Shifu Xue; Jian Wang; Dong-Xiao Huang; Lianqing Zhang
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Paper Abstract

The principle and structure of a new self-scanning laser interferometer are introduced. The output of a self-scanning photodiode array is modulated to generate an ac measurement signal, thereby avoiding dc drift and low-frequency disturbances. Experiments show that the device can be used in the range of 100 mm and with a resolution of less than 0.02µm.

Paper Details

Date Published: 1 August 1998
PDF: 3 pages
Opt. Eng. 37(8) doi: 10.1117/1.601746
Published in: Optical Engineering Volume 37, Issue 8
Show Author Affiliations
Yuxian Xu, Tsinghua Univ. (China)
Qingxiang Li, Tsinghua Univ. (China)
Shifu Xue, Tsinghua Univ. (China)
Jian Wang, Tsinghua Univ. (China)
Dong-Xiao Huang, Tsinghua Univ. (China)
Lianqing Zhang, Tsinghua Univ. (South Korea)

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