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Optical Engineering

White light interferometric surface profiler
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Paper Abstract

We describe an optical system for 3-D profilometry based on the white light interferometer. Recently many different methods have been used to analyze the data obtained from white light interferometric profilers. Many commercially available white light profilers are also in use today. We detail a simple way to construct a profiler that uses two simple and efficient algorithms. It deals with the data in a fast and simple manner, thus reducing both the acquisition and analysis time. The system has a theoretically unlimited range and can profile both optically rough and smooth surfaces.

Paper Details

Date Published: 1 June 1998
PDF: 4 pages
Opt. Eng. 37(6) doi: 10.1117/1.601727
Published in: Optical Engineering Volume 37, Issue 6
Show Author Affiliations
Brian W. Bowe, Dublin Inst. of Technology (Ireland)
Vincent Toal, Dublin Institute of Technology (Ireland)


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