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Optical Engineering

White light interferometric surface profiler
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Paper Details

Date Published: 1 June 1998
PDF: 4 pages
Opt. Eng. 37(6) doi: 10.1117/1.601727
Published in: Optical Engineering Volume 37, Issue 6
Show Author Affiliations
Brian W. Bowe, Dublin Inst. of Technology (Ireland)
Vincent Toal, Dublin Institute of Technology (Ireland)


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