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Optical Engineering

Optical and x-ray characterization applied to multilayer reverse engineering
Author(s): Thierry Boudet; M. Berger; Oliver Lartigue; B. Hirrien
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Paper Details

Date Published: 1 July 1998
PDF: 7 pages
Opt. Eng. 37(7) doi: 10.1117/1.601700
Published in: Optical Engineering Volume 37, Issue 7
Show Author Affiliations
Thierry Boudet, LETI-CEA-DOPT Couches Minces (France)
M. Berger, LETI-CEA-DOPT (France)
Oliver Lartigue, LETI-CEA-DOPT (France)
B. Hirrien, LETI-CEA-DOPT (France)


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