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Optical Engineering

Optical and x-ray characterization applied to multilayer reverse engineering
Author(s): Thierry Boudet; M. Berger; Oliver Lartigue; B. Hirrien
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Paper Abstract

The complexity of optical thin film stacks leads to new techniques being developed for characterization of components after deposition. We show the complementarity between optical characterization techniques and grazing x-ray reflectivity. We illustrate the efficiency of that complementarity for the reverse engineering of a 7-layer mirror and a 50-layer bandpass filter.

Paper Details

Date Published: 1 July 1998
PDF: 7 pages
Opt. Eng. 37(7) doi: 10.1117/1.601700
Published in: Optical Engineering Volume 37, Issue 7
Show Author Affiliations
Thierry Boudet, LETI-CEA-DOPT Couches Minces (France)
M. Berger, LETI-CEA-DOPT (France)
Oliver Lartigue, LETI-CEA-DOPT (France)
B. Hirrien, LETI-CEA-DOPT (France)

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