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Optical Engineering

Scatterometry of honed surfaces
Author(s): Jorg W. Baumgart; Horst Truckenbrodt
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Paper Details

Date Published: 1 May 1998
PDF: 7 pages
Opt. Eng. 37(5) doi: 10.1117/1.601659
Published in: Optical Engineering Volume 37, Issue 5
Show Author Affiliations
Jorg W. Baumgart, Technische Univ. Illmenau (Germany)
Horst Truckenbrodt, Technische Univ. Ilmenau (Germany)

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