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Optical Engineering

New technique to produce buried channel waveguides in glass
Author(s): Serge Pelissier; Florent Pigeon; B. Biasse; M. Zussy; Gregory Pandraud; Alain Mure-Ravaud
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Paper Abstract

We present the fabrication process and the optical characterization of buried ion-exchanged channel waveguides made by lowtemperature direct bonding on Pyrex wafers. Multimode or monomode buried channel waveguides were fabricated, and the method provides very good control over the intensity distribution.

Paper Details

Date Published: 1 April 1998
PDF: 4 pages
Opt. Eng. 37(4) doi: 10.1117/1.601647
Published in: Optical Engineering Volume 37, Issue 4
Show Author Affiliations
Serge Pelissier, TSI Lab. (France)
Florent Pigeon, TSI (France)
B. Biasse, LETI-DMITEC-CEN/G (France)
M. Zussy, LETI(CEA, Technologies Adv.) (France)
Gregory Pandraud, TSI Faculte des Sciences (France)
Alain Mure-Ravaud, Univ. Jean Monnet (France)

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