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Optical Engineering

Continuous-membrane surface-micromachined silicon deformable mirror
Author(s): Thomas G. Bifano; Raji Krishnamoorthy Mali; John Kyle Dorton; Julie A. Perreault; Nelsimar Vandelli; Mark N. Horenstein; David A. Castanon
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Paper Abstract

The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mirror was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces.

Paper Details

Date Published: 1 May 1997
PDF: 7 pages
Opt. Eng. 36(5) doi: 10.1117/1.601598
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
Thomas G. Bifano, Boston Univ. (United States)
Raji Krishnamoorthy Mali, Boston Univ. (United States)
John Kyle Dorton, Boston Univ. (United States)
Julie A. Perreault, Boston Univ. (United States)
Nelsimar Vandelli, Boston Univ. (United States)
Mark N. Horenstein, Boston Univ. (United States)
David A. Castanon, Boston Univ. (United States)

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