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Optical Engineering

Continuous-membrane surface-micromachined silicon deformable mirror
Author(s): Thomas G. Bifano; Raji Krishnamoorthy Mali; John Kyle Dorton; Julie A. Perreault; Nelsimar Vandelli; Mark N. Horenstein; David A. Castanon
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Paper Details

Date Published: 1 May 1997
PDF: 7 pages
Opt. Eng. 36(5) doi: 10.1117/1.601598
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
Thomas G. Bifano, Boston Univ. (United States)
Raji Krishnamoorthy Mali, Boston Univ. (United States)
John Kyle Dorton, Boston Univ. (United States)
Julie A. Perreault, Boston Univ. (United States)
Nelsimar Vandelli, Boston Univ. (United States)
Mark N. Horenstein, Boston Univ. (United States)
David A. Castanon, Boston Univ. (United States)


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