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Optical Engineering

Analysis of residual fabrication errors for computer controlled polishing aspherical mirrors
Author(s): Xuejun Zhang; Jingchi Yu; Zhongyu Zhang; Quandou Wang; Weiping Zheng
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Paper Abstract

A quantitative expression for residual errors and mid-spatialfrequency errors of the aspherical surface finished by computer controlled polishing (CCP) is discussed in terms of the power spectral density model. The relationship between the magnitude of these errors and the CCP parameters is investigated using experimentation. An optimized CCP process is presented to reduce the residual surface errors. By properly choosing the polishing parameters such as tool size and lap material the residual errors can be removed. The final surface error of a hyperbolic mirror has reached 0.038 wave rms with residual errors less than 0.018 wave rms.

Paper Details

Date Published: 1 December 1997
PDF: 6 pages
Opt. Eng. 36(12) doi: 10.1117/1.601578
Published in: Optical Engineering Volume 36, Issue 12
Show Author Affiliations
Xuejun Zhang, Changchun Institute of Optics and Fine Mechanics (United States)
Jingchi Yu, Changchun Institute of Optics and Fine Mechanics (China)
Zhongyu Zhang, Changchun Institute of Optics and Fine Mechanics (China)
Quandou Wang, Chang Chun Institute of Optics and Fine Mechanics (China)
Weiping Zheng, Chang Chun Institute of Optics and Fine Mechanics (China)


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