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Optical Engineering

Ultra-high-resolution optical monitoring system using a noise cancellation technique
Author(s): Neville K. S. Lee; Yimin Cai; Alfred K. K. Wong; Ajay Joneja
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Paper Abstract

The feasibility of using bi-detectors or quad-detectors for ultra-high-resolution position-monitoring systems is explored. Factors that can affect the resolution of this kind of detection system are examined. We find that one of the major limiting factors is the shifting of the laser beam. A noise cancellation technique is developed successfully to suppress this noise. Using this noise cancellation system together with a thermally compensated laser and a pinhole spatial filter in a temperatureand vibration-controlled environment, the feasibility of ultrahigh resolution (< 20 Å) for displacement monitoring is demonstrated using off-theshelf components.

Paper Details

Date Published: 1 December 1997
PDF: 7 pages
Opt. Eng. 36(12) doi: 10.1117/1.601574
Published in: Optical Engineering Volume 36, Issue 12
Show Author Affiliations
Neville K. S. Lee, Digital Equipment Corp. (Hong Kong)
Yimin Cai, Hong Kong Univ. of Science & Technology (Hong Kong)
Alfred K. K. Wong, IBM Microelectronics (Hong Kong)
Ajay Joneja, Hong Kong Univ. of Sci. & Technology (Hong Kong)

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