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Optical Engineering

Rapid pattern inspection of shadow masks by machine vision integrated with Fourier optics
Author(s): Seung-Woo Kim; SangYoon Lee; Dong-Seon Yoon
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Paper Abstract

We present a machine vision inspection method that is specially devised to detect defects on shadow masks. This method incorporates Fourier optics to capture only irregular defects in real time by blocking out the periodically repetitive pattern of normal mask holes using a pinhole type spatial filter under coherent illumination. In addition, a fast defect-detection image processing algorithm efficiently suppresses undesirable background noisy images. Experimental results prove that this method provides a detection capability of 500 ?m2 for the least defect size.

Paper Details

Date Published: 1 December 1997
PDF: 3 pages
Opt. Eng. 36(12) doi: 10.1117/1.601570
Published in: Optical Engineering Volume 36, Issue 12
Show Author Affiliations
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (South Korea)
SangYoon Lee, Korea Advanced Institute of Science and Technology (South Korea)
Dong-Seon Yoon, Korea Advanced Institute of Science and Technology (South Korea)


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