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Optical Engineering

Rapid pattern inspection of shadow masks by machine vision integrated with Fourier optics
Author(s): Seung-Woo Kim; SangYoon Lee; Dong-Seon Yoon
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Paper Details

Date Published: 1 December 1997
PDF: 3 pages
Opt. Eng. 36(12) doi: 10.1117/1.601570
Published in: Optical Engineering Volume 36, Issue 12
Show Author Affiliations
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (South Korea)
SangYoon Lee, Korea Advanced Institute of Science and Technology (South Korea)
Dong-Seon Yoon, Korea Advanced Institute of Science and Technology (South Korea)


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