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Optical Engineering

Development of an optical probe for profile measurement of mirror surfaces
Author(s): Wei Gao; Satoshi Kiyono
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Paper Details

Date Published: 1 December 1997
PDF: 7 pages
Opt. Eng. 36(12) doi: 10.1117/1.601563
Published in: Optical Engineering Volume 36, Issue 12
Show Author Affiliations
Wei Gao, Tohoku Univ. (Japan)
Satoshi Kiyono, Tohoku Univ. (Japan)

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