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Optical Engineering

Investigation of common-path interference profilometry
Author(s): Weidong Zhou; Zhaofei Zhou; Guichun Chi
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Paper Abstract

The principle of laser common-path interference profilometry based on the theory of Gaussian beams is analyzed and its measurement equation is deduced. From the measurement equation, the main factors that affect the vertical resolution of the profilometer are discussed. According to the conclusions of the analysis, laser common-path interference profilometry can be used to measure microprofiles of fine surfaces with subnanometer vertical resolution.

Paper Details

Date Published: 1 November 1997
PDF: 4 pages
Opt. Eng. 36(11) doi: 10.1117/1.601555
Published in: Optical Engineering Volume 36, Issue 11
Show Author Affiliations
Weidong Zhou, Hong Kong Univ. of Science and Technology (China)
Zhaofei Zhou, Sichuan Union Univ. (China)
Guichun Chi, Sichuan Union Univ. (China)

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