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Optical Engineering

High-resolution multidimensional displacement monitoring system
Author(s): Neville K. S. Lee; Yimin Cai; Ajay Joneja
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Paper Abstract

The possibility of using quadrant detectors to develop a new optical system that can monitor all six degrees of freedom of mechanical workpieces with very high resolution is investigated. A prototype system based on this approach has been designed and built. Although the system is not fully optimized, our proposed system has already demonstrated some promising results. Using a thermally compensated laser source together with a pinhole spatial filtering system, we have demonstrated that lateral resolution better than 50 nm and angular displacement resolution better than 0.25 ?rad is achievable with this system.

Paper Details

Date Published: 1 August 1997
PDF: 7 pages
Opt. Eng. 36(8) doi: 10.1117/1.601521
Published in: Optical Engineering Volume 36, Issue 8
Show Author Affiliations
Neville K. S. Lee, Hong Kong Univ. of Science and Technology (Hong Kong)
Yimin Cai, Hong Kong Univ. of Science & Technology (Hong Kong)
Ajay Joneja, Kong Kong Univ. of Science & Technology (Hong Kong)

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