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Optical Engineering

Inspection of diamond turning process by the combination of light scattering and angular deflection techniques: a proposed method
Author(s): Haiming Wang; Hanyu Mi
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Paper Abstract

Both form and roughness of diamond-turned surfaces are simultaneously inspected by a method combining the angular deflection and light scattering techniques. A laser beam scans the sample under test. The reflected and scattered light from the sample surface is collected by a CCD array. The direction of the specularly reflected light gives information on the surface slope, which in turn results in surface form by an integration operation. Surface roughness information is encoded in the scattering and can be recovered. Based on this concept, it is possible to develop an instrument for inspecting the diamond turning process on the production line.

Paper Details

Date Published: 1 September 1997
PDF: 9 pages
Opt. Eng. 36(9) doi: 10.1117/1.601481
Published in: Optical Engineering Volume 36, Issue 9
Show Author Affiliations
Haiming Wang, Centro de Investigaciones en Optica, AC (United States)
Hanyu Mi


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