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Optical Engineering

Measuring the proximity effects in laser pattern generation
Author(s): Sergey V. Babin
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Paper Details

Date Published: 1 September 1997
PDF: 5 pages
Opt. Eng. 36(9) doi: 10.1117/1.601479
Published in: Optical Engineering Volume 36, Issue 9
Show Author Affiliations
Sergey V. Babin, Etec Systems, Inc. (United States)


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