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Optical Engineering

Interferometric measurements of small-scale surface irregularities: source of errors
Author(s): Parameswaran Hariharan
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Paper Abstract

Interferometry has been used widely to evaluate the largescale deviations from flatness of optical surfaces. However, when making measurements of small-scale irregularities with very small amplitudes, over a wide range of spatial frequencies, errors can arise due to scattered light and the transfer function of the imaging system. A theoretical analysis of these errors showing how they can be minimized is presented.

Paper Details

Date Published: 1 August 1997
PDF: 5 pages
Opt. Eng. 36(8) doi: 10.1117/1.601460
Published in: Optical Engineering Volume 36, Issue 8
Show Author Affiliations
Parameswaran Hariharan, CSIRO (Australia)

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