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Optical Engineering

Holographic interferometric microscope for complete displacement determination
Author(s): Oliver Kruschke; Guenther K.G. Wernicke; Torsten Huth; Nazif Demoli; Hartmut Gruber
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Paper Abstract

Holographic microscopy for the simultaneous interferometric determination of all displacement components is described. The recording and the evaluation procedures are optimized by three illumination directions and conjugate reconstruction, respectively. Microscopic observation is completely separated from holographic recording. The holographic microscope performs maximum flexibility of magnification combined with high imaging accuracy. The phase-shift technique and Fourier analysis with a carrier frequency are applied for interferogram evaluation. Both methods are compared regarding the measurement range, accuracy, and handling. In-plane and out-of-plane displacement components can be measured simultaneously by both evaluation methods. A cantilever beam, a circular plate, and a surface-mounted microresistor are used to demonstrate the capabilities of the holographic microscope.

Paper Details

Date Published: 1 September 1997
PDF: 9 pages
Opt. Eng. 36(9) doi: 10.1117/1.601420
Published in: Optical Engineering Volume 36, Issue 9
Show Author Affiliations
Oliver Kruschke, Humboldt Univ. Berlin (Germany)
Guenther K.G. Wernicke, Humboldt Univ. Berlin (Germany)
Torsten Huth, Humboldt Univ. Berlin (Germany)
Nazif Demoli, Univ. of Zagreb (Croatia)
Hartmut Gruber, Humboldt Univ. Berlin (Germany)

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