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Optical Engineering

High-resolution surface reconstruction using optically measured Gabor expansion coefficients
Author(s): Michael Friedmann; Tuvia Kotzer; Joseph Shamir
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Paper Abstract

We describe a new optical inspection method based on the analysis of the combined space-frequency representation of the scattered field. Samples of the sliding window spectrum are measured optically and then the surface features are reconstructed by numerical methods. The methods investigated include reconstruction from the Gabor expansion coefficients, using the Zak transform, and phase recovery from amplitude only data, using projection onto constraint sets algorithm. Computer simulations and experimental results show that this method can reconstruct accurately shallow phase objects, even when their dimensions are smaller than the diffraction limit of the optical setup.

Paper Details

Date Published: 1 July 1997
PDF: 6 pages
Opt. Eng. 36(7) doi: 10.1117/1.601390
Published in: Optical Engineering Volume 36, Issue 7
Show Author Affiliations
Michael Friedmann, Technion--Israel Institute of Technology (Israel)
Tuvia Kotzer, Technion--Israel Institute of Technology (Israel)
Joseph Shamir, Technion-Israel Institute of Technology (Israel)


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