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Optical Engineering

Multi-point dynamic displacement probe that uses a self-focusing micro-lens array
Author(s): LiJiang Zeng; Hirokazu Matsumoto; Keiji Kawachi
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Paper Abstract

A multi-point dynamic displacement probe was developed for measuring dynamic displacement and deformation. In this probe, a selffocusing micro-lens array (SMLA) replaces a microscope objective normally used in autofocus sensors, and an acousto-optic deflector (AOD) is used as a scanner to allow the collimated laser beam to scan the SMLA, namely, allow the focused spot to scan the sample surface. Due to the very high scanning speed of the AOD, the relative position of many points, and thus the dynamic deformation, can be measured in near real time. The method’s principles, accuracy, and error sources are described.

Paper Details

Date Published: 1 May 1997
PDF: 6 pages
Opt. Eng. 36(5) doi: 10.1117/1.601358
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
LiJiang Zeng, Kawachi Millibioflight (China)
Hirokazu Matsumoto, National Research Lab. of Metrology (Japan)
Keiji Kawachi, Univ. of Tokyo (Japan)


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