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Optical Engineering

Development of micro-electro-mechanical optical scanner
Author(s): M. Edward Motamedi; Sangtae Park; A. Wang; Mahyar S. Dadkhah; Angus P. Andrews; Henry O. Marcy; Mohsen Khoshnevisan; Arthur E. T. Chiou; R. J. Huhn; C. Sell; Johannes G. Smits
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Paper Abstract

Rockwell is working on the development of a micro-electromechanical optical scanner based on bimorph microactuators. This scanner is lightweight, is small, and has superior scanning performance. The scanner is a low-power (<1 W) device that has large scan angles (?20 deg) and scan rates in the range of 100 to 2000 Hz. It works for all wavelengths and offers the potential for monolithic integration with both electronics and optics for on-chip signal processing and control. The optical scanner consists of two main components—actuator and mirror— which are fabricated on a silicon cantilever beam. The actuator is comprised of a bimorph layer covered with two metal layers, which function as top and bottom electrodes. The mirror can be as large as 12 mm2 in area, is placed at the end of the cantilever beam, and is designed for maximum optical flatness. The optical efficiency of the device is very high and can exceed 90% on proper metallization of the mirror area. The scan angle is a function of beam thickness, power efficiency of the bimorph, and many other design criteria. Through many improvements in these design parameters, a scan angle greater than 20 deg is expected to be achieved with high yield.

Paper Details

Date Published: 1 May 1997
PDF: 8 pages
Opt. Eng. 36(5) doi: 10.1117/1.601357
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
M. Edward Motamedi, Rockwell Science Ctr. (United States)
Sangtae Park, Rockwell International Corp. (United States)
A. Wang, Rockwell Science Ctr. (United States)
Mahyar S. Dadkhah, Rockwell International Science Ctr. (United States)
Angus P. Andrews, Rockwell International Corp. (United States)
Henry O. Marcy, Rockwell International Corp. (United States)
Mohsen Khoshnevisan, Rockwell International Science Ctr. (United States)
Arthur E. T. Chiou, Rockwell International Science Ctr. (Taiwan)
R. J. Huhn, Rockwell Automation (United States)
C. Sell, Rockwell Automation (United States)
Johannes G. Smits, Boston Univ. (United States)

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