Share Email Print

Optical Engineering

Single crystal silicon supported thin film micromirrors for optical applications
Author(s): Zhimin Yao; Noel C. MacDonald
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Abstract

A novel process for fabrication of single crystal silicon supported torsional micromirrors with large dimensions (300 X 240 µm) is presented. The mirrors consist of a sputtered aluminum film on a layer of supporting oxide mounted on fully suspended single crystal silicon grids. The grids have an aspect ratio of 7:1 to provide a stiff backbone and to ensure flatness of the mirror surface. Thus the mirrors do not bend due to the internal stresses. A new idea of actuation of torsional structures is also presented. Vertical near-comb type actuators were fabricated to drive the torsional structures.

Paper Details

Date Published: 1 May 1997
PDF: 6 pages
Opt. Eng. 36(5) doi: 10.1117/1.601349
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
Zhimin Yao, Texas Instruments Inc. (United States)
Noel C. MacDonald, Cornell Univ. (United States)

© SPIE. Terms of Use
Back to Top