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Optical Engineering

Micromachined electromagnetic scanning mirrors
Author(s): Raanan A. Miller; Yu-Chong Tai
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Paper Abstract

We report a new magnetic MEMS technology that enables many electromagnetic MEMS devices. This new technology combines magnetic thin films and silicon bulk micromachining. Its use is demonstrated by two types of millimeter-sized analog scanning mirrors that are capable of delivering deflection angles exceeding 60 deg. Details include the design, fabrication, operation, as well as a complete electromechanical model of the mirrors. In addition, the use of the mirrors is further manifested in a holographic data storage system where hundreds of holograms have been successfully stored and retrieved.

Paper Details

Date Published: 1 May 1997
PDF: 9 pages
Opt. Eng. 36(5) doi: 10.1117/1.601348
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
Raanan A. Miller, California Institute of Technology (United States)
Yu-Chong Tai, California Institute of Technology (United States)


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