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Optical Engineering

Linear array of complementary metal oxide semiconductor double-pass metal micromirrors
Author(s): Johannes Buehler; Franz-Peter Steiner; Roland Hauert; Henry Baltes
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Paper Details

Date Published: 1 May 1997
PDF: 8 pages
Opt. Eng. 36(5) doi: 10.1117/1.601346
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
Johannes Buehler, ETH Zuerich (Switzerland)
Franz-Peter Steiner, ETH Zuerich (Switzerland)
Roland Hauert, Swiss Federal Labs. (Switzerland)
Henry Baltes, ETH Zuerich (Switzerland)


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