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Optical Engineering

Technology and applications of micromachined silicon adaptive mirrors
Author(s): Gleb V. Vdovin; Simon Middelhoek; Pasqualina M. Sarro
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Paper Details

Date Published: 1 May 1997
PDF: 9 pages
Opt. Eng. 36(5) doi: 10.1117/1.601334
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
Gleb V. Vdovin, Technical Univ. Delft (Netherlands)
Simon Middelhoek, Delft Univ. of Technology (Netherlands)
Pasqualina M. Sarro, Delft Univ. of Technology (Netherlands)


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