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Optical Engineering

Micro-opto-mechanical beam defectors
Author(s): Steffen Gloeckner; Rolf Goering; Torsten Possner
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Paper Details

Date Published: 1 May 1997
PDF: 7 pages
Opt. Eng. 36(5) doi: 10.1117/1.601332
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
Steffen Gloeckner, Fraunhofer Institution for Applied Optics and Precision Engineering (United States)
Rolf Goering, Piezosystem Jena GmbH (Germany)
Torsten Possner, Fraunhofer Institution for Applied Optics and Precision Engineering (Germany)


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