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Optical Engineering

Micro-opto-mechanical beam defectors
Author(s): Steffen Gloeckner; Rolf Goering; Torsten Possner
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Paper Abstract

The utilization of micro-optical components in systems for optical-beam deflection and modulation offers the possibility for realization of miniaturized switches and scanners. As the required displacement of the micro-optical components for efficient beam manipulation is quite small, high-speed actuators with small electrical power consumption can be used. We present a variety of micro-optical configurations and discuss their potential for the creation of different types of miniaturized scanners and switches. The combination of micro-optical components already available and semiclassical piezoelectric actuators leads to new types of switching and modulation systems for a very broad spectrum of applications.

Paper Details

Date Published: 1 May 1997
PDF: 7 pages
Opt. Eng. 36(5) doi: 10.1117/1.601332
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
Steffen Gloeckner, Fraunhofer Institution for Applied Optics and Precision Engineering (United States)
Rolf Goering, Piezosystem Jena GmbH (Germany)
Torsten Possner, Fraunhofer Institution for Applied Optics and Precision Engineering (Germany)

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