Share Email Print
cover

Optical Engineering

Modern trends in microstructures and integrated optics for communication, sensing, and actuation
Author(s): Massood Tabib-Azar; Glenn Beheim
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Recent progress in micro-opto-electro-mechanical systems (MOEMSs) has enabled the realization of a variety of novel devices, which, because of their small size and low cost, have the potential to revolutionize the fields of communication, sensing, and actuation. These micro-optical devices can be classified as either free-space optical or guided-wave in nature, and here we focus on the latter. We review the research on this subject and discuss results from our own research. We also identify technology bottlenecks and discuss the recent trends in this dynamic field.

Paper Details

Date Published: 1 May 1997
PDF: 12 pages
Opt. Eng. 36(5) doi: 10.1117/1.601331
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
Massood Tabib-Azar, Case Western Reserve Univ. (United States)
Glenn Beheim, NASA Lewis Research Ctr. (United States)


© SPIE. Terms of Use
Back to Top