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Optical Engineering

Tradeoffs in micro-opto-electro-mechanical system materials
Author(s): Cleopatra Cabuz
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Paper Details

Date Published: 1 May 1997
PDF: 9 pages
Opt. Eng. 36(5) doi: 10.1117/1.601330
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
Cleopatra Cabuz, Honeywell Inc. (United States)

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