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Optical Engineering

Tradeoffs in micro-opto-electro-mechanical system materials
Author(s): Cleopatra Cabuz
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Paper Abstract

To build three-dimensional micro-opto-electro-mechanical systems (MOEMS), new materials have to be designed. However, increased manufacturability results generally in modified/degraded optical, mechanical, and electrical characteristics. The paper presents a detailed analysis of p + silicon as an opto-electro-mechanical material for microresonators, and gives some hints on the problems associated with the use of low-temperature dielectric in electrostatic microactuators. All the relevant parameters of p + silicon are experimentally determined and process recommendations allowing improved quality are formulated. Charge injection and trapping in low-temperature dielectric are analyzed and their impact on the behavior of the electrostatic actuators evaluated.

Paper Details

Date Published: 1 May 1997
PDF: 9 pages
Opt. Eng. 36(5) doi: 10.1117/1.601330
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
Cleopatra Cabuz, Honeywell Inc. (United States)


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