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Optical Engineering • Open Access

Guest Editorial: Special Section on Micro-Opto-Electro-Mechanical Systems
Author(s): M. Edward Motamedi

Paper Abstract

Recent industrial demands in the fields of microsystems and device miniaturization led to development of two major technologies, micro-electro-mechanical (MEM) and micro-optics. A promising team-up of these two technologies combined with microelectronics creates a rich enabling technology of micro-opto-electro-mechanical (MOEM) systems. All constituent technologies in MOEM allow for batch processing and embossing and include a micromachining process that makes them highly fascinating for commercial applications.

Paper Details

Date Published: 1 May 1997
PDF: 2 pages
Opt. Eng. 36(5) doi: 10.1117/1.601329
Published in: Optical Engineering Volume 36, Issue 5
Show Author Affiliations
M. Edward Motamedi, Rockwell Science Ctr. (United States)
Revoltech Microsystems (United States)


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