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Optical Engineering

Rugate filter manufacturing by electron cyclotron resonance plasma enhanced chemical vapor deposition of SiNx
Author(s): Pieter L. Swart; Pavel V. Bulkin; Beatrys M. Lacquet
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Paper Details

Date Published: 1 April 1997
PDF: 6 pages
Opt. Eng. 36(4) doi: 10.1117/1.601281
Published in: Optical Engineering Volume 36, Issue 4
Show Author Affiliations
Pieter L. Swart, Rand Afrikaans Univ. (South Africa)
Pavel V. Bulkin, Rand Afrikaans Univ. (South Africa)
Beatrys M. Lacquet, Rand Afrikaans Univ. (South Africa)

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